Smallest measuring surface, greatest precision.

Universal instrument for measuring on smallest and flat components and structures as well as complex multilayer systems.


Up to 50% ¹ increased
performance thanks to DPP+
Polycapillary optics
Produced in-house & constantly developed²
3 options for the
suitable polycapillary optic³
¹ ² ³ Show more
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¹ Significantly improved standard deviation and thus gauge capability or significantly reduced measurement time compared DPP to DPP+.
² Polycapillary optics, which are constantly being further developed. High-end capillary optics made by Fischer – the world's only manufacturer of X-ray fluorescence measuring instruments with its own polycapillary production.
³ Three different high-end polycapillaries available – the right solution for each of your applications: 10 µm halo-free, 20 µm halo-free or 20 µm halo.

For the highest demands down to the smallest µ.

The FISCHERSCOPE® X-RAY XDV®-µ instruments are among Fischer's high-end X-ray fluorescence measuring devices and are ideal for measuring tiny structures. They are equipped with the latest generation of powerful silicon drift detectors, microfocus tubes Ultra and in-house produced polycapillary optics. Due to the high radiation intensity, measuring times are drastically reduced and highly precise measurements on the smallest measuring spots are possible.

Meeting all challenges.

Reliable and fast results for ambitious measurement

Most advanced polycapillary optics on the market.

Our in-house manufactured polycapillary optics deliver outstanding measurement results with short measuring times

Accurate and precise.

Positioning of the measuring point on small structures thanks to automatic image recognition

Fully automatable.

Let your instrument work for you with just one click

DPP+ digital pulse processor.

Shorter measuring times or improvement of standard deviation*

*compared to the DPP

  • Features

      Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots with µ-XRF; Molybdenum anode optional

      Changeable filter

      Higher count rates and significantly reduced measurement times thanks to DPP+

      Polycapillary optics allow particularly small measuring spots with short measuring times with high intensity

      Measuring spot approx.: Ø 10 or 20 µm

      Silicon drift detector with 20 or 50 mm² active area for highest precision 

      Up to 135 mm possible height of samples

  • Application examples

      • Measuring on smallest, flat components and structures like traces, contacts or lead frames
      • Measuring functional layers in the electronics and semiconductor industry
      • Determination of complex multilayer systems
      • Automated measuring, such as in quality control
      • Measuring of light elements, e.g. determination of phosphorus content in electroless nickel under gold and palladium (ENIG/ENEPIG)

      Do you have further applications? Then contact us!

Application Notes
Product videos
Technical articles
FISCHERSCOPE® X-RAY XDV® series: Up to 50% improved performance
FISCHERSCOPE® X-RAY: Calibration of X-ray measuring instruments
FISCHERSCOPE® X-RAY tutorial: Stability test
FISCHERSCOPE® X-RAY tutorial part 1: Export / Import products in WinFTM®
FISCHERSCOPE® X-RAY tutorial part 2: Export / Import products in WinFTM®
FISCHERSCOPE® X-RAY XDV®-µ: Automated measurements on smallest structures using pattern recognition
FISCHERSCOPE® X-RAY XDV®-µ tutorial part 1: Introduction
FISCHERSCOPE® X-RAY XDV®-µ tutorial part 2: Test of stability, calibration and normalization
FISCHERSCOPE® X-RAY XDV®-µ tutorial part 3: XY programming
Setting up measurement equipment monitoring
Smaller, faster and more precise: Polycapillary optics for challenging applications
Report documentation

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