FISCHERSCOPE® X-RAY XDV®-µ SEMI
performance thanks to DPP+
Produced in-house & constantly developed²
cost-benefit ratio
¹ Significantly improved standard deviation and thus gauge capability or significantly reduced measurement time compared DPP to DPP+.
² Polycapillary optics, which are constantly being further developed. High-end capillary optics made by Fischer - the world's only manufacturer of X-ray fluorescence measuring instruments with its own polycapillary production.
Precise XRF measuring of microstructures on wafers.
The FISCHERSCOPE® X-RAY XDV®-μ SEMI is the optimal measuring solution for fully automated inspection of microstructures on wafers. The automated wafer handling and inspection process ensures a very high efficiency and enables error-free handling and measurement of wafers due to consistent inspection conditions through an encapsulated inspection environment. The powerful detector, microfocus tube Ultra and polycapillary optics for smallest measuring spots guarantee an outstanding measuring performance.
The automation solution is available as a pre-engineered solution. Benefit from an existing hardware and software design. Together we modify and adapt the automation device according to your requirements.
Fully automated.
Developed as a self-runner for a programmable, smooth measuring process
Smart details for usability.
Integrated CCTV monitoring of the complete handling process
Easy maintenance.
Large service hatches for access to individual components
DPP+ digital pulse processor.
Shorter measuring times or improvement of standard deviation*
*compared to the DPP
Clean room compatible.
No contamination of the wafers as well as constant measuring conditions
Programmable.
Automatic recognition and approach of the measuring points
Most advanced polycapillary optics on the market.
Our in-house manufactured polycapillary optics deliver outstanding measurement results with short measurement times
Ideal for testing microstructures thanks to powerful silicon drift detector and polycapillary optics for the smallest measuring spots.
With the microfocus tube Ultra, the excitation intensity is significantly increased. This ensures even better measuring performance with smallest measuring spots.
Handling robot loads measuring device with 6", 8" and 12" wafers.
Automatic docking and loading of wafers in standardized FOUPs and cassettes.
Real-time transmission, evaluation and export of measurement data with WinFTM®, the most powerful application software on the market.
Features
DPP+ for highest precision even with short measuring times
Standardized SECS/GEM communication
Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots with µ-XRF
Silicon drift detector 50 mm² for highest precision
Peltier cooling
Polycapillary optics for particularly small measuring spots of 10 or 20 µm half-width
Compatible with delivery by OHT and AGV
4-fold changeable filter
Precise, programmable measuring table with vacuum wafer chuck
Application examples
- Base metallizations in the nanometer range
- C4 and smaller solder balls
- Thin lead-free solder caps on copper pillars
- Extremely small contact areas and other complex 2.5D and 3D packaging applications
- Fully automated inspection of microstructures
Coating thickness measurement and elemental analysis of
Do you have further applications? Then contact us!
Product videos
Brochures
Product videos
FISCHERSCOPE® X-RAY XDV®-µ SEMI: Automated measurement of wafer microstructuresBrochures
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