First choice for automated wafer measuring.

Special device for automated measuring and analysis of smallest structures, very thin coatings and multilayer systems on wafers with diameters up to 12 inches.


Up to 50% ¹ increased
performance thanks to DPP+
Polycapillary optics
Produced in-house & constantly developed²
cost-benefit ratio
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¹ Significantly improved standard deviation and thus gauge capability or significantly reduced measurement time compared DPP to DPP+.
² Polycapillary optics, which are constantly being further developed. High-end capillary optics made by Fischer - the world's only manufacturer of X-ray fluorescence measuring instruments with its own polycapillary production.

Precise XRF measuring of microstructures on wafers.

The FISCHERSCOPE® X-RAY XDV®-μ SEMI is the optimal measuring solution for fully automated inspection of microstructures on wafers. The automated wafer handling and inspection process ensures a very high efficiency and enables error-free handling and measurement of wafers due to consistent inspection conditions through an encapsulated inspection environment. The powerful detector, microfocus tube Ultra and polycapillary optics for smallest measuring spots guarantee an outstanding measuring performance.

The automation solution is available as a pre-engineered solution. Benefit from an existing hardware and software design. Together we modify and adapt the automation device according to your requirements.

Fully automated.

Developed as a self-runner for a programmable, smooth measuring process

Smart details for usability.

Integrated CCTV monitoring of the complete handling process

Easy maintenance.

Large service hatches for access to individual components

DPP+ digital pulse processor.

Shorter measuring times or improvement of standard deviation*

*compared to the DPP

Clean room compatible.

No contamination of the wafers as well as constant measuring conditions


Automatic recognition and approach of the measuring points

Most advanced polycapillary optics on the market.

Our in-house manufactured polycapillary optics deliver outstanding measurement results with short measurement times

  • Features

      DPP+ for highest precision even with short measuring times

      Standardized SECS/GEM communication

      Microfocus tube Ultra with tungsten anode for even higher performance on smallest spots with µ-XRF

      Silicon drift detector 50 mm² for highest precision

      Peltier cooling

      Polycapillary optics for particularly small measuring spots of 10 or 20 µm half-width

      Compatible with delivery by OHT and AGV

      4-fold changeable filter

      Precise, programmable measuring table with vacuum wafer chuck

  • Application examples

      Coating thickness measurement and elemental analysis of

      • Base metallizations in the nanometer range
      • C4 and smaller solder balls
      • Thin lead-free solder caps on copper pillars
      • Extremely small contact areas and other complex 2.5D and 3D packaging applications
      • Fully automated inspection of microstructures

      Do you have further applications? Then contact us!

Product videos
FISCHERSCOPE® X-RAY XDV®-µ SEMI: Automated measurement of wafer microstructures

Fischer Insights.

Measuring method.

Learn and discover how the X-ray fluorescence analysis works.

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We offer you everything you need for reliable measurement results.

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Experience many good reasons that speak for us as a company.

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