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Semiconductors

High-precision coating thickness measurement and material analysis of ultra-thin multilayers and microstructures

How can you reliably measure and analyze ultra-thin, complex multilayer systems and microstructures while maintaining the highest standards of quality control in semiconductor manufacturing?

With our XRF instruments, we offer you high-performance solutions for precise coating thickness measurement and material analysis of your silicon and compound semiconductors. Whether you need a fully automated system or a compact benchtop instrument, we provide you with the right measuring solution – also for electronic applications!

Demand the best. Trust FISCHER.

Market-leader in
measurement performance
Fully and partially automated
solutions – tailored to your requirements
Best in class software
– intuitive, efficient, powerful
Polycapillary optics for
minimal spot sizes
Excellent
FISCHER customer service
Reliable spare parts supply
with original FISCHER parts

Applications

Our measuring technology is trusted worldwide by numerous customers in the semiconductor and electronics industry. Reliability, efficiency, and above all, market-leading measurement performance make our instruments indispensable. Discover the wide range of applications from wafer packaging and advanced packaging up to high-power semiconductors and electronic applications where our solutions deliver real, measurable benefits.

Lead frames

As essential components in basic packaging processes, lead frames serve as a mechanical support and electrical connection between the die and the external connections of a housing. They are often coated with complex multilayers. These typically include gold and palladium layers with thicknesses in the nanometer range, whereas the nickel layer is usually several micrometers thick. It is the filigree structure of this lead carrier that makes measurements highly error-prone and complicates quality control. Find out how you can tackle this challenge together with us!

Landing pads

In semiconductor packaging technologies, they serve as basic contact points on a chip, e.g. to attach wires during wire bonding or solder bumps during flip chip packaging. Since landing pads are made of metals such as aluminum, copper, or nickel, they are usually provided with protective or passivation coatings to prevent corrosion and metal diffusion. Are you looking for a fast and reliable measuring solution?

BGAs

Ball grid arrays (BGAs) are a type of housing for integrated circuits (ICs) and microprocessors used for mounting on PCBs. They offer a high density of connections, which are arranged as a microscopic matrix of solder balls underneath the housing. Discover how our advanced measuring solutions make testing BGAs fast and reliable!

UBM

High-quality under bump metallization (UBM) is crucial for the performance and reliability of flip chip connections. It is usually applied to metal pads to ensure better solderability and adhesion of the solder bumps later in the process. In addition, UBM forms a barrier layer against metal diffusion and thus improves the connection between chip and package. Are you ready to discover how our solutions support you in measuring your UBM?

Solder bumps

In flip chip or advanced packaging processes, such as wafer-level, 2.5D and 3D packaging technologies, solder bumps, copper pillar bumps and gold bumps are used to connect chips to the substrate or to wafers on a substrate (CoWoS). For proper functionality and cost reasons, the exact material composition – especially the SnAg concentration – of the different types of bumps as well as the coating thickness play a major role. Explore our measuring solutions for this challenge!

RDLs

Redistribution layers (RDLs) are critical components of wafer-level packaging (WLP), especially in advanced technologies such as Wafer-Level Chip Scale Packaging (WLCSP). They are used to redistribute the connection positions of a chip so that they fit to a standardized layout for different packaging designs. As the conductive tracks in RDLs are mostly made of copper, thin layers of titanium, chrome or nickel are also applied to prevent copper diffusion into the insulating materials and to achieve better adhesion. Want to find out how our measuring solutions help you?

Backside metallization

Backside metallization is a key process step in high-power semiconductor and sensor manufacturing, e.g. MEMS sensors. By carefully selecting the layers and their combination sequence, the backside metallization can be optimally matched to the specific requirements of the respective semiconductor component in terms of electrical, mechanical and thermal properties. Are you looking for a measuring solution to test your backside metallizations?

Spring contacts / Pogo pins

Pogo pins, or spring-loaded pins, are electrical connection mechanisms placed on wafers for wafer testing using probe cards. In this way, the electrical properties of the individual dies on a wafer are tested before they are cut into chips. In order to obtain absolutely reliable results in this testing process, the functional coatings of the pogo pins must be of high quality. This is where our XRF devices come into play. Discover how our advanced measuring solutions make testing pogo pins easy and precise!

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Our solutions for your challenges

Main applications

Backside metallization, landing pads, micro pads, RoHS screening

Your challenges

  • Measuring many different alloys & complex multilayers
  • Measuring small & large-scale samples 
  • Trace element analyses at very low detection limits

Our product highlights

  • Various collimator sizes up to 3 mm & filters for universal use
  • Highest precision & short measuring thanks to optimized components & measurement geometry
  • Programmable measuring table for automated measurements
  • Market-leading software with efficient workflows

FISCHERSCOPE® X-RAY XDV®-µ

Smallest spots, highest precision.

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Main applications

Lead frames, thin wires, solder bumps, micro pads, SMD components, pogo pins, BGAs, UBMs, RDLs

Your challenges

  • Measuring on microstructures
  • Measuring flat samples & ultra-thin multilayers

Our product highlights

  • Various filter, detector & polycapillary optic options for smallest measuring spots & highest precision
  • C-slot housing for easy handling of flat, large-scale samples
  • Market-leading software for challenging measuring tasks

FISCHERSCOPE® X-RAY XDV®-µ LD

Smallest spots, largest measuring distance.

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Main applications

Assembled PCBs, connectors, pogo pins

Your challenges

  • Dealing with different sample sizes & complex shapes
  • Measuring samples with assemblies on it or different levels
  • Measuring on microstructures
  • Measuring ultra-thin multilayers

Our product highlights

  • Measure smallest features on complex shaped samples thanks to our unique 35 µm polycapillary optic with large measurement distance, e.g. for wafers with potential warpage
  • C-slot housing for easy handling of flat, large-scale samples
  • Market-leading software for challenging measuring tasks

FISCHERSCOPE® X-RAY XDV®-µ WAFER

Cutting-edge technology for wafer applications.

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Main applications

Solder bumps, copper pillar bumps, gold bumps, small contact surfaces, micro pads, UBMs, RDLs

Your challenges

  • Measuring thin films & microstructures on wafers with diameters from 6'' to 12'' 
  • Dealing with wafers with potential warpage
  • Meeting cleanroom requirements

Our product highlights

  • Various detector & polycapillary optic options for highest precision on thin layers
  • Vacuum wafer chuck or customized wafer handling with mechanical flattening
  • Extensive automation options with market-leading software

FISCHERSCOPE® X-RAY XDV®-µ SEMI

First choice for automated wafer measurement.

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Main applications

Solder bumps, copper pillar bumps, gold bumps, small contact surfaces, micro pads, UBMs, RDLs

Your challenges

  • Automation of your wafer measurement process
  • Managing high throughput
  • Dealing with wafers with potential warpage
  • Meeting cleanroom requirements

Our product highlights

  • Fully automated measuring system with integrated FISCHERSCOPE® X-RAY XDV®-µ WAFER & automated wafer handling system
  • Various detector & polycapillary optic options for highest precision on thin layers
  • Market-leading software to boost your efficiency

CUSTOMIZED SOLUTIONS

The right solution for your measuring task.

Customized system construction on request, fully or semi-automated. Tailored to your application, we implement additional process steps, such as the mechanical flattening of wafers. By working together with local integration partners, we avoid long lead times.

We also offer other measuring methods apart from XRF. For more information, please contact us directly.