Semiconductors

High-precision coating thickness measurement and material analysis of ultra-thin multilayers and microstructures
How can you reliably measure and analyze ultra-thin, complex multilayer systems and microstructures while maintaining the highest standards of quality control in semiconductor manufacturing?
With our XRF instruments, we offer you high-performance solutions for precise coating thickness measurement and material analysis of your silicon and compound semiconductors. Whether you need a fully automated system or a compact benchtop instrument, we provide you with the right measuring solution – also for electronic applications!
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Applications
Our measuring technology is trusted worldwide by numerous customers in the semiconductor and electronics industry. Reliability, efficiency, and above all, market-leading measurement performance make our instruments indispensable. Discover the wide range of applications from wafer packaging and advanced packaging up to high-power semiconductors and electronic applications where our solutions deliver real, measurable benefits.

Lead frames
As essential components in basic packaging processes, lead frames serve as a mechanical support and electrical connection between the die and the external connections of a housing. They are often coated with complex multilayers. These typically include gold and palladium layers with thicknesses in the nanometer range, whereas the nickel layer is usually several micrometers thick. It is the filigree structure of this lead carrier that makes measurements highly error-prone and complicates quality control. Find out how you can tackle this challenge together with us!
Solve it with FISCHER!
Our polycapillary XRF devices, such as the FISCHERSCOPE® X-RAY XDV®-µ, are perfectly suited for measuring the coating thickness on the individual leads of lead frames.
Main applications: Coating thickness measurement of Au/Pd/NiP/CuFe and other common multilayers
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Request product consultation!Application Notes and Tutorial Notes:

Landing pads
In semiconductor packaging technologies, they serve as basic contact points on a chip, e.g. to attach wires during wire bonding or solder bumps during flip chip packaging. Since landing pads are made of metals such as aluminum, copper, or nickel, they are usually provided with protective or passivation coatings to prevent corrosion and metal diffusion. Are you looking for a fast and reliable measuring solution?
Solve it with FISCHER!
Our innovative FISCHERSCOPE® XDV® and our proven expert instrument FISCHERSCOPE® X-RAY XDV®-SDD are particularly well established for the reliable quality inspection of landing pads. Of course, our other XRF instruments, such as the FISCHERSCOPE® X-RAY XDV®-µ or the FISCHERSCOPE® X-RAY XDV®-µ WAFER, are also perfectly suited for this application.
Main applications: Coating thickness measurement of Au/Pd/NiP/Cu/wafer substrate, material analysis
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BGAs
Ball grid arrays (BGAs) are a type of housing for integrated circuits (ICs) and microprocessors used for mounting on PCBs. They offer a high density of connections, which are arranged as a microscopic matrix of solder balls underneath the housing. Discover how our advanced measuring solutions make testing BGAs fast and reliable!
Solve it with FISCHER!
Discover what high-precision quality inspection truly means with our FISCHERSCOPE® X-RAY XDV®-µ! Analyze the material composition of your BGA alloys – including verification of their lead-free status – quickly, accurately, and reliably.
Main applications: Material analysis of SnPb, SnAgCu
Download our brochure for semiconductors!
Request product consultation!Application Notes and Tutorial Notes:

UBM
High-quality under bump metallization (UBM) is crucial for the performance and reliability of flip chip connections. It is usually applied to metal pads to ensure better solderability and adhesion of the solder bumps later in the process. In addition, UBM forms a barrier layer against metal diffusion and thus improves the connection between chip and package. Are you ready to discover how our solutions support you in measuring your UBM?
Solve it with FISCHER!
For the reliable measurement of extremely thin and complex multilayer systems such as UBM, we offer our semi-automated benchtop instruments FISCHERSCOPE® X-RAY XDV®-µ and FISCHERSCOPE® X-RAY XDV®-µ WAFER, as well as our fully automated high-end system FISCHERSCOPE® X-RAY XDV®-µ SEMI. With our XRF instruments you can comply with the narrowest tolerances and ensure highest performance of electronic devices.
Main applications: Coating thickness measurement and material analysis of Au/Ni/Ti/metal pad/wafer substrate, Au/Ni/Cu/Ti/metal pad/wafer substrate, Pd/Ni/Cu/metal pad/wafer substrate
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Request product consultation!

Solder bumps
In flip chip or advanced packaging processes, such as wafer-level, 2.5D and 3D packaging technologies, solder bumps, copper pillar bumps and gold bumps are used to connect chips to the substrate or to wafers on a substrate (CoWoS). For proper functionality and cost reasons, the exact material composition – especially the SnAg concentration – of the different types of bumps as well as the coating thickness play a major role. Explore our measuring solutions for this challenge!
Solve it with FISCHER!
With our high-end XRF instruments, such as the FISCHERSCOPE® X-RAY XDV®-µ, FISCHERSCOPE® X-RAY XDV®-µ WAFER, and the FISCHERSCOPE® X-RAY XDV®-µ SEMI, you precisely measure the material composition, height, and coating thickness of your bumps.
Main applications: Material analysis and measurement of the bump height of solder and copper pillar bumps with compositions such as Sn/Ag or SnAg/Cu with Ag between 1 % and 3 %, coating thickness measurement of gold bumps such as Au/Ni/Cu/UBM/metal pad/wafer substrate
Download our brochure for semiconductors!
Request product consultation!Application Notes and Tutorial Notes:

RDLs
Redistribution layers (RDLs) are critical components of wafer-level packaging (WLP), especially in advanced technologies such as Wafer-Level Chip Scale Packaging (WLCSP). They are used to redistribute the connection positions of a chip so that they fit to a standardized layout for different packaging designs. As the conductive tracks in RDLs are mostly made of copper, thin layers of titanium, chrome or nickel are also applied to prevent copper diffusion into the insulating materials and to achieve better adhesion. Want to find out how our measuring solutions help you?
Solve it with FISCHER!
Measure your RDLs with high precision and reliability using our FISCHERSCOPE® X-RAY XDV®-µ, FISCHERSCOPE® X-RAY XDV®-µ WAFER or FISCHERSCOPE® X-RAY XDV®-µ SEMI.
Main applications: Material analysis and coating thickness measurement of RDLs, e.g. Ti/Cu
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Request product consultation!

Backside metallization
Backside metallization is a key process step in high-power semiconductor and sensor manufacturing, e.g. MEMS sensors. By carefully selecting the layers and their combination sequence, the backside metallization can be optimally matched to the specific requirements of the respective semiconductor component in terms of electrical, mechanical and thermal properties. Are you looking for a measuring solution to test your backside metallizations?
Solve it with FISCHER!
With our innovative benchtop successor FISCHERSCOPE® XDV® or our proven expert FISCHERSCOPE® X-RAY XDV®-SDD, you can precisely measure the thickness and composition of your backside metallizations and ensure the quality of your coating process. Perfectly suited to your measuring task and tailored to your needs, we also offer customized solutions, e.g. our wafer chucks to measure thicker metal layers.
Main applications: Coating thickness measurement and material analysis of common multilayer systems, e.g. Ag/Ni/Ti/Al/wafer substrate
Download our brochure for semiconductors!
Request product consultation!

Spring contacts / Pogo pins
Pogo pins, or spring-loaded pins, are electrical connection mechanisms placed on wafers for wafer testing using probe cards. In this way, the electrical properties of the individual dies on a wafer are tested before they are cut into chips. In order to obtain absolutely reliable results in this testing process, the functional coatings of the pogo pins must be of high quality. This is where our XRF devices come into play. Discover how our advanced measuring solutions make testing pogo pins easy and precise!
Solve it with FISCHER!
Measure your pogo pins with our FISCHERSCOPE® X-RAY XDV®-µ or FISCHERSCOPE® X-RAY XDV®-µ LD for complex shaped spring contacts.
Main applications: Coating thickness measurement, e.g. of Au/Ni/Cu alloy
Download our brochure for semiconductors!
Request product consultation!
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Our solutions for your challenges

Main applications
Backside metallization, landing pads, micro pads, RoHS screening
Your challenges
- Measuring many different alloys & complex multilayers
- Measuring small & large-scale samples
- Trace element analyses at very low detection limits
Our product highlights
- Various collimator sizes up to 3 mm & filters for universal use
- Highest precision & short measuring thanks to optimized components & measurement geometry
- Programmable measuring table for automated measurements
- Market-leading software with efficient workflows

Main applications
Lead frames, thin wires, solder bumps, micro pads, SMD components, pogo pins, BGAs, UBMs, RDLs
Your challenges
- Measuring on microstructures
- Measuring flat samples & ultra-thin multilayers
Our product highlights
- Various filter, detector & polycapillary optic options for smallest measuring spots & highest precision
- C-slot housing for easy handling of flat, large-scale samples
- Market-leading software for challenging measuring tasks

Main applications
Assembled PCBs, connectors, pogo pins
Your challenges
- Dealing with different sample sizes & complex shapes
- Measuring samples with assemblies on it or different levels
- Measuring on microstructures
- Measuring ultra-thin multilayers
Our product highlights
- Measure smallest features on complex shaped samples thanks to our unique 35 µm polycapillary optic with large measurement distance, e.g. for wafers with potential warpage
- C-slot housing for easy handling of flat, large-scale samples
- Market-leading software for challenging measuring tasks

Main applications
Solder bumps, copper pillar bumps, gold bumps, small contact surfaces, micro pads, UBMs, RDLs
Your challenges
- Measuring thin films & microstructures on wafers with diameters from 6'' to 12''
- Dealing with wafers with potential warpage
- Meeting cleanroom requirements
Our product highlights
- Various detector & polycapillary optic options for highest precision on thin layers
- Vacuum wafer chuck or customized wafer handling with mechanical flattening
- Extensive automation options with market-leading software

Main applications
Solder bumps, copper pillar bumps, gold bumps, small contact surfaces, micro pads, UBMs, RDLs
Your challenges
- Automation of your wafer measurement process
- Managing high throughput
- Dealing with wafers with potential warpage
- Meeting cleanroom requirements
Our product highlights
- Fully automated measuring system with integrated FISCHERSCOPE® X-RAY XDV®-µ WAFER & automated wafer handling system
- Various detector & polycapillary optic options for highest precision on thin layers
- Market-leading software to boost your efficiency
The right solution for your measuring task.
Customized system construction on request, fully or semi-automated. Tailored to your application, we implement additional process steps, such as the mechanical flattening of wafers. By working together with local integration partners, we avoid long lead times.
We also offer other measuring methods apart from XRF. For more information, please contact us directly.